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Abstract: The whole process of octadecyltrichlorosilane (OTS) self-assembled monolayer formation on glass surface was clearly revealed by using atomic Force Microscope (AFM). The growth regularity pattern of OTS self-assembled monolayer on glass substrate was obtained by analyses of the AFM images and the average surface mean roughness (R_avg) of the sample surfaces. The adsorption feature of OTS molecules on the substrate surface during the initial reaction period was probed through a comparison experiment.

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