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Abstract: The ultrasonic motor (USM) possesses heavy nonlinearities which vary with driving conditions and load-dependent characteristics such as the dead-zone. In this paper, an identification method for the rotary travelling-wave type ultrasonic motor (RTWUSM) with dead-zone is proposed based on a modified hammerstein model structure. The driving voltage contributing effect on the nonlinearities of the RTWUSM was transformed to the change of dynamic parameters against the driving voltage. The dead-zone of the RTWUSM is identified based upon the above transformation. Experiment results showed good agreement between the output of the proposed model and actual measured output.

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