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CLC number: TP2
On-line Access: 2024-08-27
Received: 2023-10-17
Revision Accepted: 2024-05-08
Crosschecked: 2010-01-27
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Design of a long range nano-scale resolution mechanism
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Shuo Hung Chang, Jen Bon Lee. Design of a long range nano-scale resolution mechanism[J]. Journal of Zhejiang University Science A, 2010, 11(4): 250-254.
@article{title="Design of a long range nano-scale resolution mechanism",
author="Shuo Hung Chang, Jen Bon Lee",
journal="Journal of Zhejiang University Science A",
volume="11",
number="4",
pages="250-254",
year="2010",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.A1000029"
}
%0 Journal Article
%T Design of a long range nano-scale resolution mechanism
%A Shuo Hung Chang
%A Jen Bon Lee
%J Journal of Zhejiang University SCIENCE A
%V 11
%N 4
%P 250-254
%@ 1673-565X
%D 2010
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.A1000029
TY - JOUR
T1 - Design of a long range nano-scale resolution mechanism
A1 - Shuo Hung Chang
A1 - Jen Bon Lee
J0 - Journal of Zhejiang University Science A
VL - 11
IS - 4
SP - 250
EP - 254
%@ 1673-565X
Y1 - 2010
PB - Zhejiang University Press & Springer
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DOI - 10.1631/jzus.A1000029
Abstract: This paper presents the development of a coarse-fine dual precision positioning stage to achieve long travel range and high accuracy. The fine stage is arranged in series with a coarse stage. The key in the fine stage design is the choice of a toggle mechanism for a tight mechanical loop with high stiffness and compactness. We designed the toggle mechanism for reduction of the displacement to suppress signal noises. The performance of the coarse and fine stages was verified with an optical encoder and capacitive sensor, respectively. The measurement results show that the dual mechanism has a travel range of 1 mm and resolution of 30 nm.
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