Full Text:
<2601>
CLC number: TN253, TB532
On-line Access: 2024-08-27
Received: 2023-10-17
Revision Accepted: 2024-05-08
Crosschecked: 0000-00-00
Cited: 0
Clicked: 5463
A NOVEL STRUCTURE OF ALL-OPTICAL TYPE SILICON MICRORESONATOR
| |||||||||||||
DING Chun, WANG Yue-lin, JIN Zhong-he, WANG Dong-ping,. A NOVEL STRUCTURE OF ALL-OPTICAL TYPE SILICON MICRORESONATOR[J]. Journal of Zhejiang University Science A, 2000, 1(3): 269-274.
@article{title="A NOVEL STRUCTURE OF ALL-OPTICAL TYPE SILICON MICRORESONATOR",
author="DING Chun, WANG Yue-lin, JIN Zhong-he, WANG Dong-ping,",
journal="Journal of Zhejiang University Science A",
volume="1",
number="3",
pages="269-274",
year="2000",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.2000.0269"
}
%0 Journal Article
%T A NOVEL STRUCTURE OF ALL-OPTICAL TYPE SILICON MICRORESONATOR
%A DING Chun
%A WANG Yue-lin
%A JIN Zhong-he
%A WANG Dong-ping
%A
%J Journal of Zhejiang University SCIENCE A
%V 1
%N 3
%P 269-274
%@ 1869-1951
%D 2000
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.2000.0269
TY - JOUR
T1 - A NOVEL STRUCTURE OF ALL-OPTICAL TYPE SILICON MICRORESONATOR
A1 - DING Chun
A1 - WANG Yue-lin
A1 - JIN Zhong-he
A1 - WANG Dong-ping
A1 -
J0 - Journal of Zhejiang University Science A
VL - 1
IS - 3
SP - 269
EP - 274
%@ 1869-1951
Y1 - 2000
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.2000.0269
Abstract: A novel all-optical type Silicon microresonator (AOSMR), with exciting and testing optical fibers is reported in this paper. It consists of a ridge optical waveguide and input and output optical fibers to pick up vibrations. The advantages include simplicity in structure and convenience in operation. Both theoretical analysis and experimental results showed that the new structure has large misalignment tolerance between the fiber and vibrator. The optical length of the fiber does not affect the output signal. In addition, the resonant frequency of the vibrator is independent of the internal stress of the silicon wafer.
[1]Amnon.Yariv, 1985. Introduction to Optical Electronics, 3rd, Ed., Holt, New York, p.29-55.
[2]Ding Chun, Jin Zhonghe, Yu Hao, et al., 1998. Initial approach for the all-optical type silicon micromechanical flow-sensor. Chinese Acta Optica Sinica, 18(3):369-372.
[3]Guckel H., Nesnidal M., Zook J.D., et al., 1993. Optical drive/sense for high-Q resonant micro-beams, Proc.7th. Int.Conf. Solid-State Sensors and Actuators (Transducers'93), Yokohama, Japan, Institute of Electrical Engineers, Japan,p.686-689.
[4]Halg,B., 1992. A silicon pressure sensor with a low-cost contactless interferometric optical readout. Sensors and Actuators, A(30):225-230.
[5]Rao Y.J., Culshaw B., 1992. Comparison between optically excited vibration of silicon cantilever and bridge microresonaters. Sensors and Actuators, A30: 203-208.
[6]Rebwar.M.A.F., 1992. Mechanisms of optical activation of micromechanical resonators. Sensors and Actuators, A33: 229-236.
[7]Richard.A.S. and Joseph.P.L., 1986. All-silicon active and passive guided-wave components for &lgr;=1.3 and 1.6 μm. IEEE J. Quantum Electronics, QE-22:873-879.
[8]Yu Hao, Ding Chun, Wang Yuelin, et al., 1998. Research of the relationship between silicon micromechanical resonators and the excited point. Chinese Acta Optica Sinica, 18(9):1445-1448.
[9]Pitcher R.J., Foulds K.W.H., Clements L.A., et al., 1990. Optothermal drive of silicon resonators: the influence of surface coatings. Sensors and Actuators, A21-A23: 387-390.
Open peer comments: Debate/Discuss/Question/Opinion
<1>