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CLC number: TP212

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Received: 2008-06-05

Revision Accepted: 2008-10-16

Crosschecked: 2009-02-25

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Journal of Zhejiang University SCIENCE A 2009 Vol.10 No.4 P.595-600

http://doi.org/10.1631/jzus.A0820420


A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide


Author(s):  Dong-lin TANG, Xiao-dong ZHANG, Guang-hui ZHAO, Zhi-yong DAI, Xin LAI, Feng GUO

Affiliation(s):  MOE Key Laboratory for Petroleum-Gas Equipment, Southwest Petroleum University, Chengdu 610500, China; more

Corresponding email(s):   xnsytdl@yahoo.com.cn

Key Words:  Integrated optics, Accelerometer, Photoelastic waveguide, Mach-Zehnder interferometer (MZI)


Dong-lin TANG, Xiao-dong ZHANG, Guang-hui ZHAO, Zhi-yong DAI, Xin LAI, Feng GUO. A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide[J]. Journal of Zhejiang University Science A, 2009, 10(4): 595-600.

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author="Dong-lin TANG, Xiao-dong ZHANG, Guang-hui ZHAO, Zhi-yong DAI, Xin LAI, Feng GUO",
journal="Journal of Zhejiang University Science A",
volume="10",
number="4",
pages="595-600",
year="2009",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.A0820420"
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%T A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide
%A Dong-lin TANG
%A Xiao-dong ZHANG
%A Guang-hui ZHAO
%A Zhi-yong DAI
%A Xin LAI
%A Feng GUO
%J Journal of Zhejiang University SCIENCE A
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%N 4
%P 595-600
%@ 1673-565X
%D 2009
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.A0820420

TY - JOUR
T1 - A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide
A1 - Dong-lin TANG
A1 - Xiao-dong ZHANG
A1 - Guang-hui ZHAO
A1 - Zhi-yong DAI
A1 - Xin LAI
A1 - Feng GUO
J0 - Journal of Zhejiang University Science A
VL - 10
IS - 4
SP - 595
EP - 600
%@ 1673-565X
Y1 - 2009
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.A0820420


Abstract: 
An investigation of the properties of a LiNbO3 photoelastic waveguide via the acceleration-induced effect is presented. A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide has been designed, which is capable of detecting seismic acceleration in high-accuracy seismic exploration. The Mach-Zehnder interferometer was successfully fabricated and a lighting test used to check its quality. The frequency response characteristic of the accelerometer was measured. The accelerometer with a resonant frequency of 3549 Hz was demonstrated to show good linear frequency responding characteristics in the range of 100~3000 Hz. The accelerometer also shows good stability and consistency. Experimental results indicate that the outputs of the on- and cross-axis are 147 and 21.3 mV, respectively.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article

Reference

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[8] Ma, T.W., Zhao, W.B., Liu, J.M., 2007. A MEMS Vibration Sensor Based on Mach Zehnder Interferometers. Proc. SPIE, 6529:2C-1.

[9] Pavelescu, L., 2001. Simplified Design Relationships for Silicon Integrated Optical Pressure Sensors Based on Mach-Zehnder Interferometry with Antiresonant Reflecting Optical Waveguides. Proc. Semiconductor Conf., 1:201-204.

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