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Abstract: The bias drift of a micro-electro-mechanical systems (MEMS) accelerometer suffers from the 1/f noise and the temperature effect. For massive applications, the bias drift urgently needs to be improved. Conventional methods often cannot address the 1/f noise and temperature effect in one architecture. In this paper, a combined approach on closed-loop architecture modification is proposed to minimize the bias drift. The modulated feedback approach is used to isolate the 1/f noise that exists in the conventional direct feedback approach. Then a common mode signal is created and added into the closed loop on the basis of modulated feedback architecture, to compensate for the temperature drift. With the combined approach, the bias instability is improved to less than 13 µg, and the drift of the Allan variance result is reduced to 17 µg at 100 s of the integration time. The temperature coefficient is reduced from 4.68 to 0.1 mg/°C. The combined approach could be useful for many other closed-loop accelerometers.

The manuscript describes a closed-loop analogue control system for a micro-machined capacitive accelerometer. The authors claim that the novelty of the described control system is the concurrent possibility of cancelling 1/f noise and temperature drift, leading to improved bias stability and a lower noise floor. The manuscript contains a brief literature review, a description of the principle of operation of the control system, simulated results and measured data to support most of the claims. In general, the topic of the manuscript is of interest to the research community, albeit the impact and novelty of the presented material in my assessment is at most medium.

一种联合调制反馈和温度补偿改善闭环MEMS电容式加速度计漂移的方法

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