index | Title |
1 | Scratch-concerned yield modeling for IC manufacturing involved with a chemical mechanical polishing process Author(s):Jiao-jiao Zhu, Xiao-hua Luo, Li-sh... Clicked:7673 Download:3933 Cited:1 <Full Text> Journal of Zhejiang University Science C 2012 Vol.13 No.5 P.376-384 DOI:10.1631/jzus.C1100242 |
2 | Novel serpentine structure design method considering confidence level and estimation precision Author(s):Li-sheng Chen, Xiao-hua Luo, Jiao-... Clicked:8201 Download:3293 Cited:0 <Full Text> Journal of Zhejiang University Science C 2013 Vol.14 No.3 P.222-234 DOI:10.1631/jzus.C1200297 |