Deep search:Searching for "Critical area" in 'KEYWORDGot 2 items.
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1Scratch-concerned yield modeling for IC manufacturing involved with a chemical mechanical polishing process
Author(s):Jiao-jiao Zhu, Xiao-hua Luo, Li-sh...  Clicked:5025  Download:3019  Cited:1  <Full Text>
Journal of Zhejiang University Science C  2012 Vol.13 No.5 P.376-384  DOI:10.1631/jzus.C1100242
2Novel serpentine structure design method considering confidence level and estimation precision
Author(s):Li-sheng Chen, Xiao-hua Luo, Jiao-...  Clicked:5124  Download:2298  Cited:0  <Full Text>
Journal of Zhejiang University Science C  2013 Vol.14 No.3 P.222-234  DOI:10.1631/jzus.C1200297
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