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Bio-Design and Manufacturing  2023 Vol.6 No.3 P.243-254

http://doi.org/10.1007/s42242-022-00220-4


Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range


Author(s):  Meng Wang, Hao Zhang, Han Wu, Suqian Ma, Lei Ren, Yunhong Liang, Chunbao Liu & Zhiwu Han

Affiliation(s):  Center of Reproductive Medicine, Center of Prenatal Diagnosis, The First Hospital of Jilin University, Changchun 130021, China; more

Corresponding email(s):   masuqian@jlu.edu.cn, lei.ren@manchester.ac.uk, liangyunhong@jlu.edu.cn

Key Words:  Bionic, Piezoresistive pressure sensor, Microstructure, Multilayer, Wide pressure range


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Meng Wang, Hao Zhang, Han Wu, Suqian Ma, Lei Ren, Yunhong Liang, Chunbao Liu & Zhiwu Han . Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range[J]. Journal of Zhejiang University Science D, 2023, 6(3): 243-254.

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Abstract: 
The human skin has the ability to sense tactile touch and a great range of pressures. Therefore, in prosthetic or robotic systems, it is necessary to prepare pressure sensors with high sensitivity in a wide measurement range to provide human-like tactile sensation. Herein, we developed a flexible piezoresistive pressure sensor that is highly sensitive in a broad pressure range by using lotus leaf micropatterned polydimethylsiloxane and multilayer superposition. By superposing four layers of micropatterned constructive substrates, the multilayer piezoresistive pressure sensor achieves a broad pressure range of 312 kPa, a high sensitivity of 2.525 kPa?1, a low limit of detection (LOD)?of <12 Pa, and a fast response time of 45 ms. Compared with the traditional flexible pressure sensor, the pressure range of this sensor can be increased by at least an order of magnitude. The flexible piezoresistive pressure sensor also shows high robustness: after testing for at least 1000 cycles, it shows no sign of fatigue. More importantly, these sensors can be potentially applied in various human motion detection scenarios, including tiny pulse monitoring, throat vibration detection, and large under-feet pressure sensing. The proposed fabrication strategy may guide the design of other kinds of multifunctional sensors to improve the detection performance.

吉林大学马愫倩等 | 在宽压力检测范围内具备高灵敏度的仿生柔性压阻传感器

本研究论文聚焦于人类皮肤感知各种压力的能力。因此,在假肢或机器人系统中,有必要制备在宽测量范围内具有高灵敏度的压力传感器,以提供类似人类的触觉感知能力。在此,我们利用带有荷叶微图案的聚二甲基硅氧烷和多层叠加技术,研制了一种在宽压力范围内具有高灵敏度的柔性压阻式传感器。通过叠加四层微图案结构基底层,传感器实现了0-312 kPa的宽压力测量范围,2.525 kPa−1的高灵敏度,压力检测下限 <12 Pa和45 ms的快速响应时间。与传统的柔性压力传感器相比,该传感器的压力测量范围提高了至少一个数量级。柔性压阻式压力传感器还显示出高稳定性:经过至少1000次循环测试后,没有疲劳迹象。更重要的是,这些传感器可以潜在地应用于各种人体运动检测场景,包括微小脉冲监测、喉部振动检测和大型脚下压力传感。所提出的制造策略可以指导其他类型的多功能传感器的设计,以提高检测性能。

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