CLC number: TH822; TH744.3
On-line Access: 2024-08-27
Received: 2023-10-17
Revision Accepted: 2024-05-08
Crosschecked: 2021-10-09
Cited: 0
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Citations: Bibtex RefMan EndNote GB/T7714
Di Chang, Pengcheng Hu, Jiubin Tan. Fused-like angles: replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer[J]. Frontiers of Information Technology & Electronic Engineering, 2021, 22(12): 1677-1684.
@article{title="Fused-like angles: replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer",
author="Di Chang, Pengcheng Hu, Jiubin Tan",
journal="Frontiers of Information Technology & Electronic Engineering",
volume="22",
number="12",
pages="1677-1684",
year="2021",
publisher="Zhejiang University Press & Springer",
doi="10.1631/FITEE.2000432"
}
%0 Journal Article
%T Fused-like angles: replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer
%A Di Chang
%A Pengcheng Hu
%A Jiubin Tan
%J Frontiers of Information Technology & Electronic Engineering
%V 22
%N 12
%P 1677-1684
%@ 2095-9184
%D 2021
%I Zhejiang University Press & Springer
%DOI 10.1631/FITEE.2000432
TY - JOUR
T1 - Fused-like angles: replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer
A1 - Di Chang
A1 - Pengcheng Hu
A1 - Jiubin Tan
J0 - Frontiers of Information Technology & Electronic Engineering
VL - 22
IS - 12
SP - 1677
EP - 1684
%@ 2095-9184
Y1 - 2021
PB - Zhejiang University Press & Springer
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DOI - 10.1631/FITEE.2000432
Abstract: representation of orientation is important in a six-degree-of-freedom grating interferometer but only a few studies have focused on this topic. Roll-pitch-yaw angles, widely used in aviation, navigation, and robotics, are now being brought to the field of multi-degree-of-freedom interferometric measurement. However, the roll-pitch-yaw angles are not the exact definitions the metrologists expected in interferometry, because they require a certain sequential order of rotations and may cause errors in describing complicated rotations. The errors increase as the tip and tilt angles of the grating increase. Therefore, a replacement based on fused angles in robotics is proposed and named “fused-like angles.” The fused-like angles are error-free, so they are more in line with the definitions in grating interferometry and more suitable for six-degree-of-freedom measurements. fused-like angles have already been used in research on the kinematic model and decoupling algorithm of the six-degree-of-freedom grating interferometer.
[1]Allgeuer P, Behnke S, 2015. Fused angles: a representation of body orientation for balance. IEEE/RSJ Int Conf on Intelligent Robots and Systems, p.366-373.
[2]Allgeuer P, Behnke S, 2018. Fused angles and the deficiencies of Euler angles. IEEE/RSJ Int Conf on Intelligent Robots and Systems, p.5109-5116.
[3]Chang D, Xing X, Hu PC, et al., 2019. Double-diffracted spatially separated heterodyne grating interferometer and analysis on its alignment tolerance. Appl Sci, 9(2):263.
[4]Cheng F, Fan KC, 2011. Linear diffraction grating interferometer with high alignment tolerance and high accuracy. Appl Opt, 50(22):4550-4556.
[5]de Jong F, van der Pasch B, Castenmiller T, et al., 2009. Enabling the lithography roadmap: an immersion tool based on a novel stage positioning system. Proc Optical Microlithography XXII, 7274:72741S.
[6]Hsieh HL, Pan SW, 2015. Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements. Opt Expr, 23(3):2451-2465.
[7]Hu PC, Chang D, Tan JB, et al., 2019. Displacement measuring grating interferometer: a review. Front Inform Technol Electron Eng, 20(5):631-654.
[8]Li XH, Shimizu Y, Ito T, et al., 2014. Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder. Opt Eng, 53(12):122405.
[9]Ye WN, Zhang M, Zhu Y, et al., 2018. Translational displacement computational algorithm of the grating interferometer without geometric error for the wafer stage in a photolithography scanner. Opt Expr, 26(26):34734-34752.
[10]Ye WN, Zhang M, Zhu Y, et al., 2019. Ultraprecision real-time displacements calculation algorithm for the grating interferometer system. Sensors, 19(10):2409.
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