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Fabrication of LaAlO3 film by sol-gel process with corresponding inorganic
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Yin Ming-zhi, Wang Min-qiang, Yao Xi. Fabrication of LaAlO3 film by sol-gel process with corresponding inorganic[J]. Journal of Zhejiang University Science A, 2004, 5(6): 696-698.
@article{title="Fabrication of LaAlO3 film by sol-gel process with corresponding inorganic",
author="Yin Ming-zhi, Wang Min-qiang, Yao Xi",
journal="Journal of Zhejiang University Science A",
volume="5",
number="6",
pages="696-698",
year="2004",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.2004.0696"
}
%0 Journal Article
%T Fabrication of LaAlO3 film by sol-gel process with corresponding inorganic
%A Yin Ming-zhi
%A Wang Min-qiang
%A Yao Xi
%J Journal of Zhejiang University SCIENCE A
%V 5
%N 6
%P 696-698
%@ 1869-1951
%D 2004
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.2004.0696
TY - JOUR
T1 - Fabrication of LaAlO3 film by sol-gel process with corresponding inorganic
A1 - Yin Ming-zhi
A1 - Wang Min-qiang
A1 - Yao Xi
J0 - Journal of Zhejiang University Science A
VL - 5
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SP - 696
EP - 698
%@ 1869-1951
Y1 - 2004
PB - Zhejiang University Press & Springer
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DOI - 10.1631/jzus.2004.0696
Abstract: Well-cubic perovskite lanthanum aluminate (LaAlO3) film on (110) silicon substrate was fabricated by sol-gel method with corresponding inorganic salts. Lanthanum acetate and aluminum acetate glacial acetic acid solutions were prepared via ligand exchange starting from lanthanum nitrate hexahydrate and aluminum nitrate hexahydrate after being refluxed. (CH3CO)2O removed nitrates and the crystallized H2O completely, acetylacetone (AcAc) was partially bidentated with metallic ion of the metallic acetates and formed La(OAc)3-x(AcAc)x, which were hydrolyzed into La(AcAc)3-x(OH)x by adding 10 ml 0.4% methyl cellulose (MCL) solution. The La(AcAc)3-x(OH)x, polymerizing and combining with MCL, formed the LaAlO3 sol precursor with heteropolymeric structure and formed film easily. The epitaxial laAlO3 film on Si(110) substrate was crystallized after being annealed in thermal annealing furnace for 650-750 °C/30 min. The morphologies and microstructures were characterized. The refractive index of the LAO film was 1.942 to 2.007; the dielectric constant and the dissipation factors were estimated to be 23-26 and 2.1×10-4-2.4×10-4respectively.
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