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CLC number: TH741; TN911.7

On-line Access: 2016-08-31

Received: 2015-08-19

Revision Accepted: 2016-02-16

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Jian Wu


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Frontiers of Information Technology & Electronic Engineering  2016 Vol.17 No.9 P.946-953


A digital moiré fringe method for displacement sensors

Author(s):  Jian Wu, Ting-ting Zhou, Bo Yuan, Li-qiang Wang

Affiliation(s):  State Key Laboratory of Modern Optical Instrumentation, CNERC for Optical Instrument, Zhejiang University, Hangzhou, 310027, China

Corresponding email(s):   yuanbo@zju.edu.cn

Key Words:  Digital moiré, fringe, Displacement measurement, Grating

Jian Wu, Ting-ting Zhou, Bo Yuan, Li-qiang Wang. A digital moiré fringe method for displacement sensors[J]. Frontiers of Information Technology & Electronic Engineering, 2016, 17(9): 946-953.

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In this study, a displacement measurement method based on digital moiré; fringe is described and experimentally demonstrated. The method is formed by only one grating with a constant pitch. First, the magnified grating image is received by an imaging array and is sent to a computer. Then, the digital moiré; fringes are generated by overlaying the grating image with its mirrored one. Finally, a specifically designed algorithm is used to obtain the fringes’ phase difference before and after movement and calculate the displacement. This method has the effects of amplifying displacement and averaging the grating lines error, the same as the traditional moiré technique using two pieces of gratings. At the same time, the proposed system is much easier to assemble and the measurement resolution can be set more flexibly. One displacement measuring system based on this method was built up. Experiment results show that its measurement errors are less than 0.3 µm and less than 0.12 µm at the resolutions of 0.1 µm and 0.03 µm, respectively.

The authors present a well-known digital Moiré fringe method, which the authors applied like a displacement sensor and claim easier to assemble and more flexible to set the resolution displacement measuring system using a single grating. Because this method does not need complex grating interference system, it has the advantage of being easy to operate. The proposal is presented in a generally clear manner. Then the author shows the displacement calculation and its resolutions. Finally some experiments and quality of the Moiré fringes are presented.




Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article


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